Standard specifications

(1)  Basicspecifications

SE image resolution   : 3.0 nm at 30 kV(x100,000, WD = 5 mm, High Vacuum Mode)
15 nm at 3 kV ( x30,000, WD = 5 mm, High Vacuum Mode)

BSE image resolution  : 4.0 nm at 30 kV ( x60,000, WD = 5 mm, 6 Pa in Low Vacuum Mode )

Magnification         : ′5– ′300,000
(Highest and lowest magnifications are dependent upon accelerating voltage, WDand scan speed)

(2)  ElectronOptics

Electron beam source  : Pre-centered Cartridge filament ( Tungsten hair-pin filament)

Accelerating voltage  : 0.3 kV – 30 kV

Gun bias              :Quadrant Bias

Beam alignment        : 2-stage electromagnetic deflection (works as beam blankingwhen an image is freezed)

Lens system           :3-stage electromagnetic lens reduction optics

Stigmator             :X-Y octopole electromagnetic

Scanning coil         : 2-stage electromagnetic deflection

Objective movable aperture: 4 holes withclick-stop design (30, 50, 80, 150 μm dia.)

Image shift           :±50 μm or larger at WD = 15 mm

Analysis position     : WD = 15 mm, TOA = 35°

Detectors             :SE detector in High vacuum mode
BSE detector in high and low vacuum modes

(3)  Specimenstage

(4)  Evacuationsystem

Evacuation control    : Fully automatic sequence with motor valves

Vacuum gauge          : Pirani gauge

Ultimate vacuum       : 1.5 x 10^-3 Pa

Adjustable pressure range: 6 – 270 Pa (inlow vacuum mode only)

Vacuum pump           :Turbo Molecular Pump(TMP) 210 l/s, ′1 Oil Rotary Pump 135 l/min.(50Hz), 162 l/min.(60Hz),  ′1

(5)  Display

Control               :Graphic User Interface(GUI), English menu

OS                    :Microsoft^® Windows^® XP Professional

Operation             :Mouse/Keyboard, Rotary knob set(option)

Monitor               :19 type LCD (1280 ′ 1024 pixels on desk top)

Image display mode    : Full screen display (1280 ′ 960 pixels)
Standard display (640 ′480 pixels)
Dual image display (640 ′480 pixels ′ 2), Signal mixing

Scanning mode         : TV/FAST

                      :Slow

                      :Reduced area (320 ′ 240 pixels)

                      :Waveform

                      :Split screen/Dual magnification

                      :High definition image capture (max. 2560 ′ 1920 pixels)

                      :Frame integration image capture (max. 2560 ′ 1920 pixels)

Scanning speed        : TV scan
(640 ′ 480 pixels, 25/30* frames/sec.)

                      :FAST scan
(full screen display: 6.3/7.5* frames/sec.)

                      :Slow scan
(full screen display: 1, 4, 20/16, 40/32, 80/64* sec./frame)
(640 ′ 480 pixels: 0.5, 2, 10/8, 20/16, 40/32*sec./frame)

                      :Reduced area scan
(320 ′ 240 pixels: 25/30,3/4* frame/sec.)
* Frequency of power supply: 50/60Hz

Automatic adjustment functions

                      :Automatic Brightness & Contrast (ABCC)

                      :Automatic Focus Control (AFC)

                      :Automatic Stigmator & Focus (ASF)

                      :Automatic Filament Saturation (AFS)

                      :Automatic Beam Alignment (ABA)

                      :Automatic Beam Setting (ABS)
(AFS + ABA + Automatic Gun Bias) 

Signal and image processing functions

                      :Improving S/N ratio by averaging (TV, FAST scan)

                      :Improving S/N ratio by pixel integration

                      :Improving S/N ratio by frame integration
(maximum frames for integration: 1024)(TV, FAST, SLOW1)

                      :Composite bi-color image display
(Real time on dual image display mode/Save image)

                      :Pseudo color display(Save image)

                      :Real time image processing
(Reversed contrast, Gamma control)

                      :Real time histogram display

                      :Image processing for save image
(Reversed contrast, Gamma control, Smoothing, Edge enhancement, etc.)

Image saving          : Image saving size
(640 ′ 480 pixels, 1280 ′ 960 pixels, 2560 ′1920 pixels, 5120 ′ 3840 pixels)

                      :Image filing format: BMP, TIFF, JPEG

Image print out       : Free layout print function in standard

Management of save image

                      :SEM data manager (Image data base) in standard
(Data management, Thumbnail display, various image processing functions)

Other functions       : Beam blanking when an image is frozen.

                      :Raster rotation

                      :Dynamic focus/Tilt compensation

                      :Data display (Image number, Accelerating voltage, Magnification, Micron marker,Unit, WD, Date, Time, Pressure, Detector)
Data display selectable between with and without image

                      :Data entry［Figures (circle, rectangular, arrow, measurement line),characters］

                      :Easy measurement function (distance between 2 points, and measurement lineswith arrow)

                      :3D Animation Maintenance Guide

                      :Image transfer to Quartz Imaging PCI

X-Ray mode function   : Input signal terminals for X-Ray Rate-meter(0 - +10V) andMapping(TTL)

                      :Scanning mode (Line analysis, Spot analysis, Average concentration analysis)

                      :DBC interface (option)

Connection port for external equipment

                      :USB interface

                      :Network interface (Ethernet), Setting up is at option.

VTR signal            :NTSC black and white signal only(BNC), an image in standard display mode only.

(6)    Safety device

                      :Protected against power failure, leakage current and vacuum failure.

(7)  Dimensionand weight